JPS49116439U - - Google Patents

Info

Publication number
JPS49116439U
JPS49116439U JP1488573U JP1488573U JPS49116439U JP S49116439 U JPS49116439 U JP S49116439U JP 1488573 U JP1488573 U JP 1488573U JP 1488573 U JP1488573 U JP 1488573U JP S49116439 U JPS49116439 U JP S49116439U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1488573U
Other languages
Japanese (ja)
Other versions
JPS5345095Y2 (en]
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1973014885U priority Critical patent/JPS5345095Y2/ja
Publication of JPS49116439U publication Critical patent/JPS49116439U/ja
Application granted granted Critical
Publication of JPS5345095Y2 publication Critical patent/JPS5345095Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Physical Or Chemical Processes And Apparatus (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
JP1973014885U 1973-02-02 1973-02-02 Expired JPS5345095Y2 (en])

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1973014885U JPS5345095Y2 (en]) 1973-02-02 1973-02-02

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1973014885U JPS5345095Y2 (en]) 1973-02-02 1973-02-02

Publications (2)

Publication Number Publication Date
JPS49116439U true JPS49116439U (en]) 1974-10-04
JPS5345095Y2 JPS5345095Y2 (en]) 1978-10-28

Family

ID=28094407

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1973014885U Expired JPS5345095Y2 (en]) 1973-02-02 1973-02-02

Country Status (1)

Country Link
JP (1) JPS5345095Y2 (en])

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2010113299A1 (ja) * 2009-04-01 2010-10-07 電気化学工業株式会社 気相反応装置

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1924997A1 (de) * 1969-05-16 1970-11-19 Siemens Ag Vorrichtung zum epitaktischen Abscheiden von Halbleitermaterial
JPS5018471A (en]) * 1973-05-31 1975-02-26

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1924997A1 (de) * 1969-05-16 1970-11-19 Siemens Ag Vorrichtung zum epitaktischen Abscheiden von Halbleitermaterial
JPS5018471A (en]) * 1973-05-31 1975-02-26

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2010113299A1 (ja) * 2009-04-01 2010-10-07 電気化学工業株式会社 気相反応装置
JP5511795B2 (ja) * 2009-04-01 2014-06-04 電気化学工業株式会社 気相反応装置

Also Published As

Publication number Publication date
JPS5345095Y2 (en]) 1978-10-28

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